SPEC./Model

L1289 / L2500

Laser

Beam
Positioner

Measurement
system

Viewing

Computer
Controller

Handler

Autoloader

Fiber laser (20W)

Wavelength：1065 ± 10 nm

Cooling Method：

Field size：95×95 mm (Trimming area 150×150 mm)

Resolution：1.5μm

Repeatability：2μm

Spot size：＜30μm

Trimming speed：0.1 to 1200 mm/sec

Type：Reed relay

Channel：128/single,32/4wires

Range：＜0.001 ohm to＞100 ohm

Accuracy：+/-(0.0002/R + 0.02 + 0.00002 x R)% (R in Kohm)

Trim area：CCD camera with lens viewing

Substrate Alignment：CCD with pattern recognition.

Type：Standard Industry Computer

CPU Type：Pentium Base

X/Y/Z stage：250×250×15mm

XYZ Resolution：＜5μm

R stage：>±5°

Dimensions：
W1040×D1302×H1880mm

Dimensions：
W880×D1040×H1450mm

Weight：1200 kg

Weight：1100 kg

Power：AC 220V single phase

Air Supply：85~115 psi

Parts Load/unload：
Elevators load/unload form
2 magazine carousel.

Cartridge Capacity：
300 mm

Transfer Cycle Time：0.8s

Substrate Size：adjustable
70 to 150 mm

Elevator Driver：
Micro-stepping motor

Pickup Type：Vacuum Cup