|
| Laser |
Beam
Positioner |
Measurement
system |
| Viewing |
Computer
Controller |
| Handler |
| Autoloader |
|
| Fiber laser (20W) |
| Wavelength：1065 ± 10 nm |
| Cooling Method： |
|
| Field size：95×95 mm (Trimming area 150×150 mm) |
| Resolution：1.5μm |
| Repeatability：2μm |
| Spot size：＜30μm |
| Trimming speed：0.1 to 1200 mm/sec |
|
| Type：Reed relay |
| Channel：128/single,32/4wires |
| Range：＜0.001 ohm to＞100 ohm |
| Accuracy：+/-(0.0002/R + 0.02 + 0.00002 x R)% (R in Kohm) |
|
| Trim area：CCD camera with lens viewing |
| Substrate Alignment：CCD with pattern recognition. |
|
| Type：Standard Industry Computer |
| CPU Type：Pentium Base |
|
| X/Y/Z stage：250×250×15mm |
| XYZ Resolution：＜5μm |
| R stage：>±5° |
Dimensions：
W1040×D1302×H1880mm |
Dimensions：
W880×D1040×H1450mm |
| Weight：1200 kg |
Weight：1100 kg |
| Power：AC 220V single phase |
| Air Supply：85~115 psi |
|
Parts Load/unload：
Elevators load/unload form
2 magazine carousel. |
* |
Cartridge Capacity：
300 mm |
* |
| Transfer Cycle Time：0.8s |
* |
Substrate Size：adjustable
70 to 150 mm |
* |
Elevator Driver：
Micro-stepping motor |
* |
| Pickup Type：Vacuum Cup |
* |
|
